"Method
and Apparatus for Producing Biaxially Oriented Thin Films" was invented by
Alexander Usoskin (Gottingen , Germany ) and Lutz Kirchhoff (Hattorf , Germany ).
According
to the abstract released by the U.S.
Patent & Trademark Office: "A method and an apparatus serve to produce
thin films having a biaxial crystal orientation.
The method includes the steps
of: depositing atoms on a substrate, the atoms having a composition
corresponding to the thin film to be produced; bombarding the deposited atoms
with an energized beam, the energized beam being oriented with respect to the
substrate at an angle of a defined range of angles, the step of bombarding
substantially taking place during a different time period than the step of
depositing; and alternately repeating the step of depositing and the step of
bombarding for a plurality of times."
The
patent was filed on Feb. 16, 2006, under Application No. 11/355,427.
For
further information please visit: http://patft.uspto.gov/netacgi/nph-Parser?
Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=7829156&OS=7829156&RS=7829156
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